Picarro's New 1-ppb Class Chemical Metrology Solution for Lithography
Picarro Inc., a leading provider of chemical metrology systems for advanced semiconductor fabs, announced the SLiM 100 Lithography Process Tool Monitoring System. The new 1-ppb class chemical metrology solution detects volatile organic compounds (VOCs) in the lithography process in real time, enabling semiconductor manufacturers to quickly take steps to prevent excursions and detect non-visual defects, thereby improving yield.